- Title
- 半導體製造之動態調整的比例積分控制器及線寬與覆蓋誤差之實證研究
- Translated title
- A Dynamic Adjusted Proportional-Integral Controller for Semiconductor Manufacturing and an Empirical Study of Critical Dimension and Overlay Errors
- Creators - without role
- 宏鍇 王
- Identifiers
- 9957767599606774
- Academic Unit
- Executive Cross-Discipline Master Program for Intelligent Manufacturing, Office of Academic Affairs, National Tsing Hua University
- Resource Type
- Other
Other
半導體製造之動態調整的比例積分控制器及線寬與覆蓋誤差之實證研究
2010
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