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Analytic System Of Wafer Bin Map And Non-Transitory Comuter Readable Media Thereof
Patent

Analytic System Of Wafer Bin Map And Non-Transitory Comuter Readable Media Thereof

National Tsing Hua University, 許嘉裕, 陳薇如 and 簡禎富
18/02/2015

Abstract

The present invention relates to an analytic system of wafer bin map and a non-transitory computer readable media thereof. The analytic system of wafer bin map includes a wafer bin map input module, a wafer bin map database, a degeneration module, a standardization module, a coordinate transformation module, a defect density characterization module, a test of randomness module, a similarity comparison module, and a pattern evaluation module.

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