Anticorrosion layer on objective lens for liquid immersion application

Patent

Anticorrosion layer on objective lens for liquid immersion application

06/11/2003

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Title: Anticorrosion layer on objective lens for liquid immersion application
Creators - without role: 林本堅
Identifiers: 9957787532106774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Patent
Date application: 06/11/2003