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Device For Recognizing Wafer Identification Number With Automatically Turning On And Off Recognizing Function
Patent

Device For Recognizing Wafer Identification Number With Automatically Turning On And Off Recognizing Function

National Tsing Hua University, 葉維彰, TAN, Shi-Yi and LIN, Yuan Tzu
17/08/2023

Abstract

A device for recognizing wafer identification number with automatically turning on and off recognizing function comprises a base, a support frame, a light source, a plurality of image capturing units, an image recognition unit and a control unit. The base comprises a wafer boat placing portion and a first switch disposed on the wafer boat placing portion. The light source and the image capturing units are disposed on the support frame. The control unit is electrically connected to the first switch, the light source, the image capturing units and the image recognition unit. As such, the device for recognizing wafer identification number with automatically turning on and off recognizing function can automatically turn on and off the light source, the image capturing units, and the image recognition unit, therefore the operation is very easy and convenience.

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