- Title
- Immersion Lithography System Using a Sealed Wafer Bath
- Creators - without role
- 林本堅
- Identifiers
- 9957787965206774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Patent
- Date application
- 03/11/2006
Patent
Immersion Lithography System Using a Sealed Wafer Bath
03/11/2006
Metrics
1 Record Views