- Title
- Immersion fluid for immersion lithography, and method of performing immersion lithography
- Creators - without role
- 林本堅Yee-Chia YeoChenming Hu
- Identifiers
- 9957787979706774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Patent
- Date application
- 18/03/2004
Patent
Immersion fluid for immersion lithography, and method of performing immersion lithography
18/03/2004
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