Abstract
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro electromechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. Th e light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI o r display an image. The position sensors detect the position of the free end f or control. The light detector receives light backscattered from the ROI separa te from, or at the fixed end the cantilever.