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Interconnect Structure With Twin Boundaries And Method For Forming The Same
專利

Interconnect Structure With Twin Boundaries And Method For Forming The Same

Taiwan Semiconductor Manufacturing Company Ltd., Jian-Hong Lin, Chwei-Ching Chiu, Yung-Huei Lee, Chien-Neng Liao, Yu‐Lun Chueh, Tsung-Cheng ChanChun-Lung Huang
23/02/2017

摘要

A semiconductor device structure with twin-boundaries and method for forming the same are provided. The semiconductor device structure includes a substrate and a conductive structure formed over the substrate. The conductive structure includes twin boundaries, and a density of the twin boundaries is in a range from about 25 μm−1 to about 250 μm−1.

相關連結

指標

1 檢視次數

詳細資料

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