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Method And Apparatus For Determining Dynamic Response Of Microstructure By Using Pulsed Broad Bandwidth Ultrasonic Transducer As BAW Hammer
Patent

Method And Apparatus For Determining Dynamic Response Of Microstructure By Using Pulsed Broad Bandwidth Ultrasonic Transducer As BAW Hammer

Computed Ultrasound Global Inc., 方維倫 and Lai, Wen Pin
18/12/2002

Abstract

A method and/or an apparatus for determining the dynamic response of a microstructure is disclosed. A piezocomposite ultrasonic transducer device formed of a piezoelectric material and a polymer material around said piezoelectric ceramic material is used to provide a pulsed bulk acoustic wave having a bandwidth of at least 20% to excite a microstructure. The microstructure is attached onto the transducer, and the pulsed bulk acoustic wave generated through the transducer in response to a pulse voltage excites the microstructure to vibrate. Meanwhile, the dynamic response of the microstructure can be monitored by a laser Doppler vibrometer, and shown by an oscilloscope.

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