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Method For Dynamic Experimental Design
Patent

Method For Dynamic Experimental Design

National Tsing Hua University, 簡禎富 and 莊世鐘
17/02/2016

Abstract

The present invention discloses a method for dynamic experimental design that is applied in a semiconductor manufacturing process. During an experimental design process, it will be checked whether an experimental target range is changed so as to rebuild an experimental design table and retain completed experimental factors in order achieve the purpose of dynamically adjusting the experimental factors. The method for dynamic experimental design according to the present invention can be effectively applied in the high-tech industry.

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