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Method For Manufacturing Terahertz Device
專利

Method For Manufacturing Terahertz Device

National Tsing Hua University, 楊尚樺, Chen, Wang-ChienWu, Tsung-Han
28/12/2023

摘要

The present disclosure provides a method for manufacturing a terahertz (THz) device. The method includes a step of forming a light-absorbing structure on a substrate by using a chemical vapor deposition (CVD) process. The substrate includes a semiconductor structure, a sapphire substrate, a quartz substrate, or a combination thereof. The light-absorbing structure includes a semiconductor material, a two-dimensional material, a low-dimensional material, a magnetic material, a topological material, or a combination thereof.

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1 檢視次數

詳細資料

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