Abstract
A method for electroless metal deposition includes steps as follows. a) a substrate is provided, and the substrate has a surface which is subjected to a hydroxide surface modification to form a hydrophilic chemical oxide layer; b) a catalyst layer is formed on the chemical oxide layer, the catalyst layer includes a plurality of colloidal nanoparticles, and each of the plurality of colloidal nanoparticles includes a palladium nanoparticle and a high molecular polymer which wraps the palladium nanoparticle; and c) an electroless metal deposition is conducted, and a metal is deposited on the catalyst layer to form an electroless metal layer. An electroless metal layer included substrate is also provided.