Abstract
Methods for making transistors with a semiconducting monolayer are disclosed. The semiconducting monolayer is covered with a hexagonal boron nitride (hBN) monolayer. A thin gate dielectric layer can then be formed upon the hBN monolayer using a plasma-enhanced deposition process, without the semiconducting monolayer being damaged by the plasma. The resulting structure maintains high mobility in the semiconducting layer, has improved capacitance, and good heat dissipation.