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Micro Normally-Closed Structure And Method For Manufacturing The Same
Patent

Micro Normally-Closed Structure And Method For Manufacturing The Same

National Tsing Hua University, 方維倫 and 賴威成
07/10/2015

Abstract

The present invention relates to a micro normally-closed structure, which is manufactured by a MEMS process and used as a MEMS component. The structure includes a base and a fixed contact; and a flexible arm including a first end and a movable contact, wherein the first end is electrically connecting to the base, and remaining a normally closed electrically conducting state between the movable contact and the fix end.

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