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Micro Scanner And Manufacturing Process, Driving Structure And Driving Method Therefor
Patent

Micro Scanner And Manufacturing Process, Driving Structure And Driving Method Therefor

National Tsing Hua University, 方維倫, Tang, Tsung-Lin and Yang, Huseh-An
02/01/2008

Abstract

A method for manufacturing a magnetic-induction element is provided. The method includes steps of: a) providing a substrate, b) forming an adhesive layer on the substrate, c) forming a seed layer on the adhesive layer, d) removing a part of the seed layer to reveal a part of the adhesive layer, e) partially forming a resistance on the seed layer and the revealed part of the adhesive layer, f) forming a magnetic-induction layer on the seed layer and the revealed part of the adhesive layer, g) removing the resistance, and h) removing a part of the substrate and the revealed part of the adhesive layer.

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