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Non-Volatile Semiconductor Device, And Method Of Operating The Same
Patent

Non-Volatile Semiconductor Device, And Method Of Operating The Same

Lin, Chrong-Jung, 金雅琴, 金雅琴 and 林崇榮
11/10/2012

Abstract

A non-volatile semiconductor device and a method for operating the same are disclosed, where the non-volatile semiconductor device includes a gate dielectric layer, a n-type floating gate, a coupling gate, a first n-type source/drain, a second n-type source/drain, a first contact plug and a second contact plug. The gate dielectric layer is formed on a p-type semiconductor substrate. The n-type floating gate is formed on the gate dielectric layer. The first n-type source/drain and the second n-type source/drain are formed in the p-type semiconductor substrate. The first and second contact plugs are formed on the first and second n-type source/drains respectively. The coupling gate consists essentially of a capacitor dielectric layer and a third contact plug, where the capacitor dielectric layer is formed on the n-type floating gate, and the third contact plug is formed on the capacitor dielectric layer.

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