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Nonvolatile semiconductor memory
Patent

Nonvolatile semiconductor memory

Toshiba Corp, 白田理一郎, Masayuki Ichige, Fumitaka Arai, Toshitake Yaegashi, Yoshio Ozawa, Akihito Yamamoto, Ichiro Mizushima and Yoshihiko Saito
26/03/2012

Abstract

A nonvolatile semiconductor memory includes first and second memory cells having a floating gate and a control gate. The floating gate of the first and second memory cells is comprised a first part, and a second part arranged on the first part, and a width of the second part in an extending direction of the control gate is narrower than that of the first part. A first space between the first parts of the first and second memory cells is filled with one kind of an insulator. The control gate is arranged at a second space between the second parts of the first and second memory cells.

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