Abstract
The present invention relates to a photolithography capacity planning system and a non-transitory computer readable media thereof. The photolithography capacity planning system includes a cost calculation module, a capacity calculation module, a demand calculation module, and a data processing module. The cost calculation module calculates a production cost, an unfulfilled demand cost, and a mask cost of the photolithography manufacturing process. The capacity calculation module calculates a capacity of light sources, a capacity of shared equipments, and a capacity of specified equipments of the photolithography manufacturing process. The demand calculation module calculates a quantity of unfulfilled demand. The data processing module produces a planning result.