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Semiconductor Device And Manufacturing Method Thereof
Patent

Semiconductor Device And Manufacturing Method Thereof

Innoscience (Suzhou) Technology Co., Ltd., 黃敬源, Mao, Danfeng, Wang, Wei, Zhang, Xiaoyan, Zhang, Jinhan and Sheng, Jianjian
24/11/2022

Abstract

The present disclosure relates to a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a first nitride semiconductor layer disposed on the substrate, a second nitride semiconductor layer disposed on the first nitride semiconductor layer and having a bandgap greater than that of the first nitride semiconductor layer. The semiconductor device further includes a first gate conductor disposed on a first region of the second nitride semiconductor layer, a passivation layer covering the first gate conductor, and a second gate conductor disposed on the passivation layer and on a second region of the second nitride semiconductor layer, wherein the first region is laterally spaced apart from the second region.

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