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Semiconductor Device And Manufacturing Method Thereof
Patent

Semiconductor Device And Manufacturing Method Thereof

Innoscience (Zhuhai) Technology Co., Ltd. and 黃敬源
19/08/2021

Abstract

The present disclosure provides a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a barrier layer disposed above the substrate, and a dielectric layer disposed on the barrier layer and defining a first recess. The semiconductor device further includes a spacer disposed within the first recess and a gate disposed between a first portion of the spacer and a second portion of the spacer, wherein the gate defining a first recess.

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