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Semiconductor Device With Asymmetric Gate Structure
Patent

Semiconductor Device With Asymmetric Gate Structure

Innoscience (Zhuhai) Technology Co., Ltd., 黃敬源, Liao, Hang, Li, Chang An, Wang, Chao, Zhou, Chunhua and Zhao, Qiyue
23/12/2021

Abstract

The present invention relates to a semiconductor device with an asymmetric gate structure. The device comprises a substrate; a channel layer, positioned above the substrate; a barrier layer, positioned above the channel layer, the barrier layer and the channel layer being configured to form two-dimensional electron gas (2DEG), and the 2DEG being formed in the channel layer along an interface between the channel layer and the barrier layer; a source contact and a drain contact, positioned above the barrier layer; a doped group III-V layer, positioned above the barrier layer and between the drain contact and the source contact; and a gate electrode, positioned above the doped group III-V layer and configured to form a Schottky junction with the doped group III-V layer, wherein the doped group III-V layer and/or gate electrode has a non-central symmetrical geometry so as to achieve the effect of improving gate leakage current characteristics.

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