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Texture Inducing Structure For Alloy Films And Texture Inducing Method Thereof
Patent

Texture Inducing Structure For Alloy Films And Texture Inducing Method Thereof

張禎元, 張禎元, 金重勳, 蕭恆昇 and 蕭祺儒
13/12/2018

Abstract

A texture inducing structure for alloy films is provided. The texture inducing structure includes a substrate, a texture-inducing layer and a deposition layer. The texture-inducing layer is formed on the substrate. The texture-inducing layer has an intrinsically strong crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 µm to 6 µm. The deposition layer is formed on the texture-inducing layer. A texture of the deposition layer is induced by the texture-inducing layer thereby changing the magnetic anisotropy and the magnetic strength of the deposition layer, a thickness of the deposition layer is ranged from 1 µm ~ 60 µm, and the thickness of the deposition layer is greater than that of the texture-inducing layer.

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