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一種降低晶片應力之結構與其製造方法
Patent

一種降低晶片應力之結構與其製造方法

國立清華大學, 俞浩, 蔡念豫, 張世杰 and 錢睿宏
01/09/2013

Abstract

The present invention provides a structure and manufacturing method for reducing stress of chip. The structure comprises a Through-Silicon Via (TSV) hole, a plurality of reinforcing bases, and a plurality of base bodies. These reinforcing bases are near and around the TSV hole. The base body is set on one side edge of the reinforcing base. Wherein, the reinforcing base or the base body does not connect with the TSV hole.

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