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三族氮化物垂直柱基板
Patent

三族氮化物垂直柱基板

國立清華大學, 財團法人工業技術研究院, 果尚志, 賴志銘, 劉文岳, 沈昌宏, 蔡政達, 許榮宗 and 林弘偉
01/12/2007

Abstract

A group-III nitride vertical-rod array substrate is provided. The group-III nitride vertical-rod array substrate comprises a substrate, a buffer layer and a vertical-rod array layer. The buffer layer is located on the substrate. The vertical-rod array layer is comprised of several vertical rods standing on the buffer layer.

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