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偏光照射方法とその装置
Patent

偏光照射方法とその装置

株式会社日立製作所HITACHI LTD, 鈴木堅吉SUZUKI KENKICHI, 大江昌人, 松田正昭MATSUDA MASAAKI and 松山茂MATSUYAMA SHIGERU
28/05/1999

Abstract

PROBLEM TO BE SOLVED: To simultaneously obtain a wide visual field angle and the display uniformity having less conspicuous display abnormality by making the polarization axis of separated P polarized wave components to be coincided with the short side direction of a rectangular shape beam pattern and passing through an organic high polymer film. SOLUTION: A polarization separating means 108 is arranged with a Brewster's angle and S wave components B (a polarization axis AXs ) contained in incident light beams A of a beam pattern BP are selectively reflected by the means 108. Thus, the light beams, which pass the means 108 and arrive at an irradiation surface, have only the P wave components having a polarization axis AFp . By moving a scanning stage, the irradiation surface is two- dimensionally irradiated with the range which is wider than the size of the pattern BP. If the polarization separating plate, which is made by forming multi-layers on the surface of a rectangular quartz plate, is used for the means 108, the short side of the plate is coincided with the surface that is parallel to the P wave polarization axis AXp and a large area irradiation surface is efficiently irradiated.

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