Abstract
A wideband equivalent circuit model establishment method is suitable for semiconductor devices. This method is provided to apply an ultra-short pulse signal to an object under test, measure its reflective and transmissive responses, and establish its corresponding equivalent circuit model based on the physical characteristics of different elements, so as to describe the measured reflective/transmissive waveforms of the ultra-short impulse signal. Because the established circuit model can precisely describe the measured reflective/transmissive waveforms of the ultra-short pulse signal, the circuit model can also precisely describe the ultra-wideband range included in the ultra-short pulse signal, and thus it is termed as a wideband equivalent circuit model.