Logo image
全集成主被動積體光學於矽基積體電路及其製作方法
Patent

全集成主被動積體光學於矽基積體電路及其製作方法

國立清華大學, 李明昌 and 曾治國
16/11/2015

Abstract

A method is provided to integrate all active and passive integrated optical devices on a silicon-based integrated circuit (IC). A silicon-based substrate is used for integrating the devices instead of a silicon-on-insulator (SOI) substrate. Therefore, cost is down and heat dissipation efficiency is enhanced. Besides, rapid melt growth (RMG) is used for solving problems about integrating the electric circuit and the optical devices. The present invention can be used to develop a forward-looking optical transceivers on a standard wafer; or, to fully and compatibly integrate all devices to a circuit on an optical communication chip.

Metrics

1 Record Views

Details

Logo image