Abstract
The invention relates to a resonance assembly and biaxial assembly, and a method for making biaxial assembly and micro system assembly. The biaxial assembly comprises a first substrate with many electrodes, a first joining layer on first substrate, a moving layer with a ring part, an actuating part, a first rotating axle and a second rotating axle, wherein the first joining layer is connected with the first substrate; a second joining layer which is connected with the moving layer, and a preserving cover, wherein the second joining layer is connected with the moving layer. Wherein first substrate, first joining layer, moving layer, second joining layer and the preserving cover together form a vacuum cavity; the actuating part and first rotating axle are positioned on the vacuum cavity; second rotating axle is along to outer part of vacuum cavity.