Abstract
The present invention provides a manufacturing method of solar cell with curved burying electrode wires and solar cell thereof, which is a method for forming a mask by printing and then using the wet etching or dry etching to etch the curved trenches on a silicon semiconductor substrate; and, during processing, using the mask formed by printing as a resist etchant for etching the silicon semiconductor substrate region covered by the mask and allowing the etching by the etchant in the silicon semiconductor substrate region not covered by the mask, so as to generate a plurality of trenches with patterns, and the trenches are in a curved shape. Thus, the present invention may wet or dry etch the aforementioned curved trench array, which is not easy to cause the wafer break during processing, and the depth is deeper than that of he conventional linear trench, and thus may further enable the light with longer wavelength to be transformed into electrons and to be collected by the electrode in better efficiency. Therefore, the present invention provides a processing method which is suitable for mass production and may achieve high production yield with simple processing and lower equipment cost, and further fabricate the solar cell element with higher performance.