Abstract
Probe with light waveguide for the scanning probe/scanning near-field optical microscopy, which could reduce the difficulty of manufacture of the traditional light guide structure, would be proposed in this invention. This structure includes light waveguide, light source and light reflective structure which disposed on the substrate with a cantilever beam. The said substrate has an active region of light waveguide, light source and light reflective structure. The light waveguide structure could receive the light from light source and transmit the light to the light reflective structure. The light reflective structure could be made elsewhere or be fabricated on the substrate directly which could reduce the cost of the manufacture of the light reflective structure.