Abstract
The present invention relates to a sensor chip having a micro inductor structure. The chip includes a supporting structure layer and a micro inductor layer. The micro inductor layer forms on the supporting structure layer and has an inductance. The micro inductor layer includes an insulation layer, at least one magnetic layer, and a micro winding layer. When an external physical quantity is applied to the sensor chip, the micro inductor layer can deform correspondingly and cause the inductance changing. The change of the inductance can be measured by an inductance measurement circuit. The circuit could be an external circuit or be integrated into the sensor chip. The present invention has benefits of simple structure, low cost, easy to manufacture, high sensitivity and temperature stability.