Abstract
A inertial sensor with stress isolation structure, which includes a substrate, a suspending bridge, a guard ring and a electro-mechanical transformation structure. The structure has a recess and a surrounding wall encompassing the recess. The suspending bridge is disposed in the recess and connected with the surrounding wall. The guard ring is connected with the suspending bridge and suspended in the recess, and the suspending bridge is located between the substrate and the guard ring. The electro-mechanical transformation structure which is connected with the guard ring is surrounded by the guard ring. By means of installing the guard ring, the disturbance caused by the external force from the environment is reduced, the precision of the inertial sensor is improved, and the influence of the packaging process on the performance of the sensor is reduced. Furthermore, the packaging process, the testing, and the correct process are simplified so as the production cost is lowered.