Abstract
A system and method for nanoimprint with mold deformation detector is provided, adapted to function in real time monitoring the deformation of mold intellectually. An embedded electrostatic plate capacitor is comprised by at least two metal film electrodes which manufactured by silicon micromachining process on both sides of mold. During imprinting, mold sustains an external force and deformations occur, which inducing the change of relative distance between both metal film electrodes and resulting in capacitance variance of capacitor. The quantity for deformation of mold is determined by comparing capacitance variance with a reference value. The nanoimprint mold system and intellectual real time detecting and monitoring method are consisted of mold system, detecting and monitoring device.