Abstract
A kind of a piezoelectric thin film with a complex nano-structure, and which includes a substrate formed of piezoelectric polymer of β type, the substrate comprises a bottom region with opposite the first and the second base-face, and a complex nano-structure formed in the first base-face, and the complex nano-structure comprises a plurality of protrusions and a plurality of nanograsses. The protrusions protrude from the first base-face to far from the second base-face, a top of the first base-face and the protrusions are both formed a surface, and the nanograsses protrude from the surface to far from the second base-face. The invention further includes a touch sensor apparatus, including the piezoelectric thin film and a electrode unit, the electrode unit comprises the first electrode formed on the second base-face, and the second electrode stacked on the piezoelectric thin film to connect with the complex nano-structure, and there is space between the second electrode and the piezoelectric thin film.