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具有非对称栅极结构的半导体器件
Patent

具有非对称栅极结构的半导体器件

英诺赛科(珠海)科技有限公司, 赵起越, 黃敬源, 王超, 廖航, 周春华 and 李长安
18/09/2020

Abstract

The invention relates to a semiconductor device with an asymmetric gate structure. The semiconductor device comprises a substrate; a channel layer positioned above the substrate; a barrier layer overthe channel layer; a source electrode contact and a drain electrode contact which are positioned above the barrier layer; a doped III-V group layer over the barrier layer and between the drain contactand the source contact; and a gate electrode which is located above the doped III-V group layer and is configured to form a Schottky junction with the doped III-V group layer. The barrier layer and the channel layer are configured to form a two-dimensional electron gas, and the two-dimensional electron gas is formed in the channel layer along an interface between the channel layer and the barrierlayer; and the doped III-V group layer and/or the gate electrode have/has a non-centrosymmetric geometric structure, so that the device achieves an effect of controlling a gate leakage current distribution pattern in application.

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