Abstract
A new electronic signal measurement equipment with plural contact element is proposed in this invention. This invention establishes a floating structure between the measurement substrate and the contact element. This floating structure disperses the shock stress between the plural contact element and the device with plural electrode during testing the said device, and increases the life time of the electronic signal measurement equipment. The electronic measurement equipment comprises a channel excavated in the measurement substrate, and floating structure with contact element made above the said channel. The electronic signal connection structure comprises contact element, contact element pad, circuit pattern on the measurement substrate, through-hole in the measurement substrate and the contact electrode.