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具高散熱及絕緣特性之矽-鑽石結構及其製造方法
Patent

具高散熱及絕緣特性之矽-鑽石結構及其製造方法

財團法人工業技術研究院, 劉丙寅, 張延瑜, 周長彬, 謝丞聿, 丁嘉仁 and 蔡宏營
15/01/2007

Abstract

A silicon-diamond structure having the properties of high heat-dissipation and insulation comprises a first substrate, a backfill layer, a diamond layer and a second substrate. The backfill layer is located on the upper side of the first substrate. The diamond layer is located above the backfill layer with the surface facing the backfill layer being rough. The second substrate is located above the diamond layer.

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