Abstract
A method of nanoimprinting a piezoelectric polymeric material includes: heating a surface of the piezoelectric polymeric material to an imprinting temperature greater than (T.sub.c-25).degree. C. and less than T.sub.c, in which T.sub.c is the Curie temperature of the piezoelectric polymeric material; and pressing the heated surface of the piezoelectric polymeric material using a nanoimprinting template having a nanopillar structure so as to form the piezoelectric polymeric material with high aspect ratio nanopillars.