Abstract
A method of manufacturing a LIGA mold by backside exposure includes the steps of: disposing a mask layer on a predetermined-light transparent first substrate, which has a front side and a backside; forming a photoresist layer on the front side of the first substrate; providing a predetermined-light source to illuminate the backside of the first substrate so as to expose the photoresist layer to form an exposed portion and an unexposed portion; removing the unexposed portion to form a patterned structure on the photoresist layer; forming a metal layer on the patterned structure of the photoresist layer and the first substrate; and removing the photoresist layer and the first substrate to remain the metal layer as a LIGA mold, which is good in a demolding procedure of a hot embossing process.