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半导体元件及其制作方法
Patent

半导体元件及其制作方法

台湾积体电路制造股份有限公司, 詹前泰, 吴忠政, 黃敬源 and 林大文
12/10/2011

Abstract

The invention provides a semiconductor device and a method of manufacturing the same. The semiconductor device comprises a substrate, an electrode over the substrate, and a piezoelectric layer disposed between the substrate and the electrode. The piezoelectric layer causes a strain in the substrate when an electric field is generated by the electrode. The semiconductor device and the method of manufacturing the same could adjust the strain of the groove in different operation conditions.

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