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半导体装置和其制造方法
Patent

半导体装置和其制造方法

英诺赛科(珠海)科技有限公司 and 黃敬源
13/10/2020

Abstract

The present disclosure provides a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a barrier layer disposed above the substrate, and a dielectric layer disposed on the barrier layer and defining a first recess. The semiconductor device further includes a spacer disposed within the first recess and a gate disposed between a first portion of the spacer and a second portion of the spacer, wherein the gate defining another recess.

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