Abstract
This invention provides an optical interferometric apparatus for real-time full-field thickness inspection, which includes two light source units, two screens, two image acquisition devices, and an image processing module. The light source units can generate a first incident light and a second incident light which traveling to a reference point of a plane object. The first incident light and the second incident light are of high-coherence point-expanded spherical-wavefront light beam and generate a first interference fringe pattern and a second interference fringe pattern, respectively. The first interference fringe pattern and the second interference fringe pattern are imaged to the screens, respectively. The image acquisition devices are set on the screens to capture the first interference fringe pattern and the second interference fringe pattern, respectively. The image processing module is connected with the image acquisition to obtain a digital signal and to calculate a full-field thickness of the plane object.