Abstract
This invention provides a sensing device, which includes a substrate, a dielectric housing, a tunable body, and an electrode unit. The dielectric housing comprises a dielectric bottom portion that formed on the substrate, a dielectric side portion that formed on edge of the dielectric bottom, and a dielectric top portion that connect with the dielectric side portion and define a containing space with the dielectric bottom portion and the dielectric side portion. The tunable body filled the containing space, and the rigidity of the tunable body can be changed by an electric field or a magnetic field. The electrode unit is not in contact with the tunable body, and comprises a first electrode layer that formed in dielectric bottom portion, and a second electrode layer that formed in dielectric top portion. When applying the electric fields or the magnetic field at the electrode unit, the shape of the tunable body is deformed depend on the rigidity of the tunable body.