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合金膜結晶織構誘導方法及其結構
Patent

合金膜結晶織構誘導方法及其結構

國立清華大學, 張禎元, 蕭恆昇, 金重勳 and 蕭祺儒
16/01/2019

Abstract

A texture inducing method for alloy films is provided together with the structure thereof. The texture inducing structure includes a sbustrate, a texture inducing layer and a coating layer. The texture inducing layer is formed on the substrate and has an intrinsic strong texture. The texture coefficient of the texture inducing layer is greater than 2, and the thickness thereof is 0.1~6 μm. The coating layer is formed on the texture inducing layer. The texture of the coating layer is induced by the texture inducing layer, thereby enhancing the magnetic anisotropy and the magnetic properties of the coating layer. The thickness of the coating layer is 1~60 μm, and the thickness of the coating layer is greater than the thickness of the texture inducing layer. Moreover, a texture inducing layer/coating layer composite structure can be formed. The composite structure can be repeatedly stacked to form a multilayered composite structure.

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