Abstract
This invention provides a multistage sensing device, which includes a substrate, a main body, and a measurement unit. The main body comprises a first stage body portion that formed on the substrate and has a first space, and a second stage body portion that formed on the first stage body portion and has a second space. The measurement unit comprises a first measurement member that formed between the first stage body portion and the second stage body portion, a second measurement member that formed in the first stage body portion and above the second space. The shape of the second stage body portion is deformed by applying an external force on the main body, and further leads the first stage body portion to change its shape.