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奈米壓印之模仁結構
財團法人工業技術研究院
,
程智勇
,
蔡宏營
and
吳志宏
31/01/2004
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Abstract
一種奈米壓印之模仁結構,係於一以矽為材料製成的模仁本體之一壓印面上附著有一奈米類鑽碳膜/一奈米晶粒鑽石膜,使得模仁具備有抗磨耗性佳、容易脫模及表面光滑等特性。
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Title
奈米壓印之模仁結構
Translated title
Mold Insert Structure For Nano-Meter Impression
Creators - without role
財團法人工業技術研究院
程智勇
蔡宏營
吳志宏
Identifiers
9957787726606774
Academic Unit
Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language
Traditional Chinese
Resource Type
Patent
Patent
575022; 219613
Date application
08/06/2003
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