Abstract
A nono-biochemical sensor and fabricating method thereof are provided. Firstly, an insulting layer is formed on the substrate, and a semiconductor thin film is formed on the insulating layer. And then, the semi-conductor layer is defined and doped impurities for forming a nano-wire, source and drain located on both sides of the nano-wire, and a side-gate near the nano-wire. The nano-biochemical sensor fabricated by this method can reduce the detecting error and improve the sensitivity.