Abstract
The present invention provides a structure of flexible probe, which includes at least an electrode using nano carbon tubes as the electrode interface. Furthermore, the nano carbon tubes located on the surface of electrode has been subjected to an ultraviolet ozone treatment process so that the surface of nano carbon tubes has a large number of carboxy functional groups for greatly reducing the interfacial impedance between the above-mentioned electrode and the biological tissue liquid in order to obtain better measurement quality. The present invention also provides a method of producing the above-mentioned structure of flexible probe, which comprises the following steps: preparing a flexible substrate; forming a conductive layer on the flexible substrate, and separately defining an electrode, a conductive wire, and a metal solder pad on the conductive layer; forming a layer of nano carbon tubes on the electrode; forming an insulating layer on the conductive layer so that the conductive wire is isolated from the surrounding; and performing an ultraviolet ozone treatment on the layer of nano carbon tubes.