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彈性導電柱體、製造方法及使用其的探針卡
Patent

彈性導電柱體、製造方法及使用其的探針卡

國立清華大學, 蔡宏營 and 莊凱傑
28/02/2021

Abstract

An elastic and electroconductive pin includes surface-modified nano-fullerene spheres, surface-modified nano-metal particles and surface-modified graphene each having surface function groups; and a polymeric material for crosslinking the surface-modified nano-fullerene spheres, nano-metal particles and graphene together to form a pin structure, wherein the surface function groups enhances bonding between the surface-modified nano-fullerene spheres, nano-metal particles and graphene to increase the transfer paths for electrons, and increasing the adhering strengths between the polymeric material and the surface-modified nano-fullerene spheres, surface-modified nano-metal particles and surface-modified graphene. A manufacturing method for the pin and a probe card using the pin are also disclosed.

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