Abstract
The present invention discloses a micro optical pickup head module, method of manufacturing the same and method of manufacturing the objective lens of the same, wherein at least two Fresnel zone plates are formed on a transparent substrate, and a set of mirrors having an acute angle with the substrate mutually is formed by the inclined exposure process specially using thick film photoresist. The positions of the mirror sets are located above the Fresnel zone plates respectively. Metal layers are deposited onto the plane outside the acute angle of the mirror sets respectively, wherein one metal layer makes a mirror become a reflective mirror, the other metal layer makes the other mirror become a transflective beam splitter. A laser head is disposed on the other surface of the Fresnel lens opposed to the substrate. A photodetector is installed on the other surface of the other Fresnel zone plate opposed to the substrate.